Patent Assignment
Reel/Frame 030155/0948
Assignment of Assignor's Interest
Recorded: 2013-04-05
Pages: 4
Assignors
TAKEDA, TSUYOSHI
Executed: 2013-04-01
SATO, TAKETOSHI
Executed: 2013-04-01
KOHASHI, MINORU
Executed: 2013-04-01
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Method of Manufacturing a Semiconductor Device, Method of Processing a Substrate, Substrate Processing Apparatus, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.