IP Library › Granted Patent US 6,727,654
Granted Patent Utility
US 6,727,654 · Confirmation No. 6215

PLASMA PROCESSING APPARATUS

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2003-09-12 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-07-15 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-07-15 FOR Foreign Reference 6 View
2001-01-10 TRNA Transmittal of New Application 1 View
2001-01-10 ADS Application Data Sheet 1 View
2001-01-10 SPEC Specification 39 View
2001-01-10 CLM Claims 4 View
2001-01-10 ABST Abstract 1 View
2001-01-10 DRW Drawings-only black and white line drawings 8 View
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Quick Facts
Patent No.
US 6,727,654
App. No.
09/756,873
Filed
2001-01-10
Granted
2004-04-27
Pub. No.
US20020047536A1
Examiner
VU, JIMMY T
Art Unit
2821
PTA
-153 days