Method of manufacturing semiconductor device
The present invention is provided to improve quality or manufacturing throughput of a semiconductor device. A method includes supplying a source gas to a substrate in a process chamber; exhausting an inside of the process chamber; supplying a reaction gas to the substrate; and exhausting the inside of the process chamber, wherein the source gas and/or the reaction gas is supplied in temporally separated pulses in the supply of the source gas and/or in the supply of the reaction gas. Then, the source gas and/or the reaction gas is supplied in temporally separated pulses to form a film during a gas supply time determined by a concentration distribution of by-products formed on a surface of the substrate.
1. A method of manufacturing a semiconductor device comprising forming a film on a substrate by repeating a cycle, the cycle comprising:
(a) supplying a source gas to the substrate accommodated in a process chamber and exhausting the source gas from the process chamber; and
(b) alternately repeating: (b-1) supplying a reaction gas to the substrate in the process chamber free of the source gas; and (b-2) exhausting the reaction gas from the process chamber, wherein
the reaction gas is supplied in (b-2) at a flow rate lower than a flow rate of the reaction gas supplied in (b-1), and
the flow rate of the reaction gas supplied in (b-2) increases as (b-2) is repeated in the cycle.
2. The method of claim 1 , wherein each exhaust process in (a) and (b) comprises at least one of a vacuum exhaust and a gas purge by an inert gas supply.
3. The method of claim 1 , wherein the substrate comprises a pattern thereon.
4. A method of manufacturing a semiconductor device comprising forming a thin film on a substrate by repeating a cycle, the cycle comprising:
(a) adsorbing a source gas on the substrate accommodated in a process chamber by performing: (a-1) supplying the source gas to the substrate; and (a-2) removing the source gas from the process chamber; and
(b) reacting a reaction gas with the source gas adsorbed on the substrate in the process chamber free of the source gas to form a thin film layer on the substrate by alternately repeating:
(b-1) supplying the reaction gas to the substrate; and (b-2) removing the reaction gas from the process chamber, wherein
the reaction gas is supplied in (b-2) at a flow rate lower than a flow rate of the reaction gas supplied in (b-1), and
the flow rate of the reaction gas supplied in (b-2) increases as (b-2) is repeated in the cycle.
5. The method of claim 4 , wherein each of (a-2) and (b-2) comprises at least one of a vacuum exhaust and a gas purge by an inert gas supply.
6. The method of claim 4 , wherein the substrate comprises a pattern thereon.