Granted Patent
Utility
US 6,540,469
· Confirmation No. 4541
SUBSTRATE PROCESSING APPARATUS
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2005-01-11 | CLMPTO |
Complete Marked Up Copy of Claims Prepared by USPTO | 3 | View | |
| 2001-09-05 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-09-05 | SPEC |
Specification | 35 | View | |
| 2001-09-05 | CLM |
Claims | 5 | View | |
| 2001-09-05 | ABST |
Abstract | 1 | View | |
| 2001-09-05 | DRW |
Drawings-only black and white line drawings | 15 | View | |
| 2001-09-05 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Tatsuhisa Matsunaga
Tokyo, JAPAN
Kouichi Noto
Tokyo, JAPAN
Attorneys & Agents of Record
Classification
USPC
414/416.08
H10P72/3312
H10P32/00
H10P72/3412
C23C16/54
Y10S414/137
Prosecution
- Examiner
- KEENAN, JAMES W
- Art Unit
- 3652
- Customer No.
- 23364
- Docket No.
- MATS3002/EM/7199
- Confirmation No.
- 4541
Foreign Priority
2000-268036
·
2000-09-05
·
JAPAN
Publication
- Pub. No.
- US20020037210A1
- Pub. Date
- 2002-03-28
Patent Term Adjustment
0days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2018-12-31
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-12-05
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Quick Facts
- Patent No.
- US 6,540,469
- App. No.
- 09/945,643
- Filed
- 2001-09-05
- Granted
- 2003-04-01
- Pub. No.
- US20020037210A1
- Examiner
- KEENAN, JAMES W
- Art Unit
- 3652
- PTA
- 0 days
External Links