Patent Assignment
Reel/Frame 011780/0511
Assignment of Assignor's Interest
Recorded: 2001-05-04
Received: 2001-05-14
Pages: 3
Assignee
SILICON INTERGRATED SYSTEMS CORP.
SCIENCE-BASED INDUSTRIAL PARK, NO. 16, CREATION RD. 1, HSIN-CHU, TWX, R.O.C, TAIWAN
Covered Property
(1)
Method of Prevention of Particle Pollution in a Pre-Clean Chamber
Application:
09/848,375 →