IP Library › Patent Application 09848375
Patent Application Utility
App. No. 09/848,375 · Confirmation No. 6786

METHOD OF PREVENTION OF PARTICLE POLLUTION IN A PRE-CLEAN CHAMBER

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2001-05-04 TRNA Transmittal of New Application 3 View
2001-05-04 SPEC Specification 3 View
2001-05-04 CLM Claims 1 View
2001-05-04 ABST Abstract 1 View
2001-05-04 DRW Drawings-only black and white line drawings 4 View
2001-05-04 OATH Oath or Declaration filed 2 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
App. No.
09/848,375
Filed
2001-05-04
Granted
2003-03-25
Pub. No.
US20020164435A1
Art Unit
1762
PTA
0 days