Patent Assignment
Reel/Frame 011813/0537
Assignment of Assignor's Interest
Recorded: 2001-05-10
Pages: 5
Assignee
ANGSTRON SYSTEMS, INC.
71 BONAVENTURA DRIVE, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Method and Apparatus for Improved Temperature Control in Atomic Layer Deposition
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.