Patent Assignment
Reel/Frame 011824/0510
Assignment of Assignor's Interest
Recorded: 2001-05-08
Pages: 4
Assignors
GERHARD, MICHAEL
Executed: 2001-01-24
DIECKMANN, NILS
Executed: 2001-01-26
SIELER, CHRISTINE
Executed: 2001-01-02
ZEHETBAUER, MARCUS
Executed: 2001-01-24
Assignee
CARL-ZEISS-STIFTUNG TRADING AS CARL ZEISS
D-89518 HEIDENHEIM (BRENZ), GERMANY
Covered Property
(1)
Process for the Decontamination of Microlithographic Projection Exposure Devices
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.