Patent Assignment
Reel/Frame 011832/0618
Assignment of Assignor's Interest
Recorded: 2001-05-22
Received: 2001-05-30
Pages: 5
Assignors
DURR, PETER
Executed: 2001-03-01
LAKNER, HUBERT KARL
Executed: 2001-03-01
SANDSTROM, TORBJORN
Executed: 2001-03-13
Assignees
MICRONIC LASER SYSTEMS AB
NYTORPSVAGEN 9, TABY, SEX, SWEDEN
FRAUNHOFER-GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
LEONARDSTRASSE 54, NYTORPSVAGEN 9, D-80636 MUNICH, DEX, GERMANY
Covered Property
(1)
Method and Apparatus for Microlithography
Application:
09/765,084 →