IP Library › Granted Patent US 6,624,880
Granted Patent Utility
US 6,624,880 · Confirmation No. 6134

METHOD AND APPARATUS FOR MICROLITHOGRAPHY

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2003-07-15 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-07-15 LET. Miscellaneous Incoming Letter 1 View
2003-07-15 DRW Drawings-only black and white line drawings 9 View
2001-01-18 TRNA Transmittal of New Application 1 View
2001-01-18 TRNA Transmittal of New Application 3 View
2001-01-18 SPEC Specification 15 View
2001-01-18 CLM Claims 9 View
2001-01-18 ABST Abstract 1 View
2001-01-18 DRW Drawings-only black and white line drawings 9 View
2001-01-18 TRNA Transmittal of New Application 1 View
2001-01-18 TRNA Transmittal of New Application 3 View
2001-01-18 SPEC Specification 15 View
2001-01-18 CLM Claims 9 View
2001-01-18 ABST Abstract 1 View
2001-01-18 DRW Drawings-only black and white line drawings 9 View
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Quick Facts
Patent No.
US 6,624,880
App. No.
09/765,084
Filed
2001-01-18
Granted
2003-09-23
Pub. No.
US20020105629A1
Examiner
KIM, PETER B
Art Unit
2851
PTA
-90 days