Patent Assignment
Reel/Frame 011842/0684
Assignment of Assignor's Interest
Recorded: 2001-05-16
Received: 2001-06-01
Pages: 4
Assignor
DYER, TIMOTHY S.
Executed: 2001-05-16
Assignee
SPEEDFAM-IPEC CORPORATION
305 NORTH 54TH STREET, CHANDLER, AZ, 85226, UNITED STATES
Covered Property
(1)
Dynamic Slurry Distribution Control for Cmp
Application:
09/859,656 →