IP Library › Granted Patent US 6,652,366
Granted Patent Utility
US 6,652,366 · Confirmation No. 3907

DYNAMIC SLURRY DISTRIBUTION CONTROL FOR CMP

Inventor: Timothy S. Dyer
Patented Case View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2008-12-04 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2008-11-13 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2001-05-16 TRNA Transmittal of New Application 5 View
2001-05-16 ADS Application Data Sheet 1 View
2001-05-16 SPEC Specification 13 View
2001-05-16 CLM Claims 2 View
2001-05-16 ABST Abstract 1 View
2001-05-16 DRW Drawings-only black and white line drawings 7 View
2001-05-16 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,652,366
App. No.
09/859,656
Filed
2001-05-16
Granted
2003-11-25
Pub. No.
US20020173249A1
Art Unit
3723
PTA
0 days