Patent Assignment
Reel/Frame 011846/0160
Assignment of Assignor's Interest
Recorded: 2001-05-29
Pages: 3
Assignor
CALIFORNIA, UNIVERSITY OF
Executed: 2001-03-09
Assignee
U.S. DEPARTMENT OF ENERGY
P.O. BOX 808 (L-376), LIVERMORE, CALIFORNIA, 94550
Covered Property
(1)
Phase-Shifting Point Diffraction Interferometer Focus-Aid Enhanced Mask
Patent:
6,151,115 →
Application:
09/361,780 →
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Dec 10, 2003
From: NAULLEAU, PATRICK
To: REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE
Reel/Frame 014772/0758 →
Assignment of Assignor's Interest
May 5, 2004
From: REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE
To: EUV LLC
Reel/Frame 014601/0343 →
Corrective Assignment to Correct Serial Number 09632831, 09099389 and 09956180 Number Should Be 09632631, 09627533 and 09956160. Previously Recorded on Reel 014601 Frame 0343.
Jul 12, 2004
From: REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE
To: EUV LLC
Reel/Frame 015552/0067 →