Patent Assignment
Reel/Frame 015552/0067
Corrective Assignment to Correct Serial Number 09632831, 09099389 and 09956180 Number Should Be 09632631, 09627533 and 09956160. Previously Recorded on Reel 014601 Frame 0343.
Recorded: 2004-07-12
Pages: 8
Assignor
REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE
Executed: 2003-12-17
Assignee
EUV LLC
2200 MISSION COLLEGE BLVD., INTEL CORPORATION MAIL STOP SC1-01, SANTA CLARA, CALIFORNIA, 95054
Covered Properties
(25)
Phase-Shifting Point Diffraction Interferometer Mask Designs
Patent:
6,307,635 →
Application:
09/176,617 →
Phase-Shifting Point Diffraction Interferometer Grating Designs
Patent:
6,195,169 →
Application:
09/176,695 →
Graphical User Interface for Image Acquisition and Processing
Patent:
6,341,183 →
Application:
09/181,036 →
Method and Apparatus for Inspecting Reflection Masks for Defects
Patent:
6,555,828 →
Application:
09/193,198 →
Null Test Fourier Domain Alignment Technique for Phase-Shifting Point Diffraction Interferometer
Patent:
6,111,646 →
Application:
09/229,449 →
Dual-Domain Point Diffraction Interferometer
Patent:
6,100,978 →
Application:
09/300,539 →
In Situ Alignment System for Phase-Shifting Point-Diffraction Interferometry
Patent:
6,118,535 →
Application:
09/324,903 →
Phase-Shifting Point Diffraction Interferometer Focus-Aid Enhanced Mask
Patent:
6,151,115 →
Application:
09/361,780 →
Fourier-Transform and Global Contrast Interferometer Alignment Methods
Patent:
6,239,878 →
Application:
09/409,646 →
Phase-Shifting Point Diffraction Interferometer Phase Grating Designs
Patent:
6,266,147 →
Application:
09/419,703 →
Multi-Level Scanning Method for Defect Inspection
Patent:
6,484,306 →
Application:
09/466,730 →
Miniature self-contained vacuum compatible electronic imaging microscope
Patent:
6,327,102 →
Application:
09/520,295 →
System for Interferometric Distortion Measurements That Define an Optical Path
Patent:
6,559,952 →
Application:
09/569,168 →
Hybrid Shearing and Phase-Shifting Point Diffraction Interferometer
Patent:
6,573,997 →
Application:
09/617,719 →
Interferometric at-wavelength flare characterization of EUV optical systems
Patent:
6,233,056 →
Application:
09/627,533 →
Dual-Domain Lateeral Shearing Interferometer
Patent:
6,707,560 →
Application:
09/632,631 →
Method of Fabricating Reflection-Mode Euv Diffraction Elements
Patent:
6,392,792 →
Application:
09/730,970 →
Method of Fabricating Reflection-Mode Euv Diffusers
Method and Apparatus for Inspecting an Euv Mask Blank
Apparatus for Generating Partially Coherent Radiation
Diffractive Optical Element for Extreme Ultraviolet Wavefront Control
Holographic Illuminator for Synchrotron-Based Projection Lithography Systems
Synchrotron-Based Euv Lithography Illuminator Simulator
Apparatus for Generating Partially Coherent Radiation
Extended Surface Parallel Coating Inspection Method
Related Assignments
(19)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Aug 31, 2001
From: NAULLEAU, PATRICK P.
To: UNIVERSITY OF CALIFORNIA, THE REGENT OF THE
Reel/Frame 012141/0744 →
Assignment of Assignor's Interest
Sep 17, 2001
From: GOLDBERG, KENNETH ALAN; NAULLEAU, PATRICK P.
To: REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE
Reel/Frame 012196/0380 →
Assignment of Assignor's Interest
Oct 16, 2001
From: NAULLEAU, PATRICK P.
To: REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE
Reel/Frame 012286/0504 →
Assignment of Assignor's Interest
Jan 14, 2002
From: GOLDBERG, KENNETH A.
To: REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE
Reel/Frame 012479/0892 →
Confirmatory License
Feb 12, 2002
From: CALIFORNIA, REGENTS OF THE UNIVERSITY OF
To: U.S. DEPARTMENT OF ENERGY
Reel/Frame 012596/0736 →
Confirmatory License
Apr 17, 2002
From: CALIFORNIA, UNIVERSITY OF
To: ENERGY, U.S. DEPARTMENT OF
Reel/Frame 012829/0791 →
Confirmatory License
Apr 17, 2002
From: CALIFORNIA, UNIVERSITY OF
To: ENERGY, U.S. DEPARTMENT OF
Reel/Frame 012829/0801 →
Assignment of Assignor's Interest
Jun 5, 2002
From: NAULLEAU, PATRICK P.
To: REGENTS OF THE UNIVERSITY OFCALIFORNIA, THE
Reel/Frame 012985/0631 →
Confirmatory License
Jan 21, 2003
From: CALIFORNIA, UNIVERSITY OF
To: U.S. DEPARTMENT OF ENERGY
Reel/Frame 013669/0661 →
Confirmatory License
Jan 21, 2003
From: CALIFORNIA, UNIVERSITY OF
To: U.S. DEPARTMENT OF ENERGY
Reel/Frame 013696/0587 →
Assignment of Assignor's Interest
Feb 25, 2003
From: BOKOR, JEFFREY; LIN, YUN
To: REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE
Reel/Frame 013797/0750 →
Assignment of Assignor's Interest
Nov 14, 2003
From: GOLDBERG, KENNETH ALAN; NAULLEAU, PATRICK P.
To: CALIFORNIA, UNIVERSITY OF THE REGENTS OF THE
Reel/Frame 014691/0028 →
Assignment of Assignor's Interest
Nov 14, 2003
From: NAULLEAU, PATRICK P.; GOLDERG, KENNETH ALAN
To: REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE
Reel/Frame 014691/0019 →
Assignment of Assignor's Interest
Nov 14, 2003
From: GOLDBERG, KENNETH ALAN; NAULLEAU, PATRICK P.
To: REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE
Reel/Frame 014686/0470 →
Assignment of Assignor's Interest
Dec 10, 2003
From: NAULLEAU, PATRICK
To: REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE
Reel/Frame 014772/0758 →
Assignment of Assignor's Interest
May 5, 2004
From: REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE
To: EUV LLC
Reel/Frame 014601/0343 →
Nunc Pro Tunc Assignment
May 10, 2004
From: UNIVERSITY OF CALIFORNIA, LAWRENCE BERKELEY NATIONAL LABORATORY
To: U.S. DEPARMTENT OF ENERGY
Reel/Frame 014613/0261 →
Confirmatory License
Nov 17, 2005
From: REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE
To: UNITED STATES DEPARTMENT OF ENERGY
Reel/Frame 017281/0007 →
Confirmatory License
Oct 25, 2006
From: REGENTS OF THE UNIVERSITY OF CALIFORNIA
To: ENERGY, UNITED STATES DEPARTMENT
Reel/Frame 018448/0846 →