IP Library Granted Patent US 6,768,567
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Granted Patent Utility
US 6,768,567 · Confirmation No. 3817

SYNCHROTRON-BASED EUV LITHOGRAPHY ILLUMINATOR SIMULATOR

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Quick Facts
Patent No.
US 6,768,567
App. No.
10/163,479
Filed
2002-06-05
Granted
2004-07-27
Pub. No.
US20030227657A1
Art Unit
2872
PTA
-77 days