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Granted Patent
Utility
US 6,768,567
· Confirmation No. 3817
SYNCHROTRON-BASED EUV LITHOGRAPHY ILLUMINATOR SIMULATOR
Inventor:
Patrick P. Naulleau
No downloadable documents found — record may not be publicly available.
Inventors
Patrick P. Naulleau
Oakland, CA
Attorneys & Agents of Record
Classification
USPC
359/15
G03F7/70591
G02B5/32
G02B13/143
G02B13/26
G03F7/70108
G03F7/70141
G03F7/70158
Prosecution
- Examiner
- BOUTSIKARIS, LEONIDAS
- Art Unit
- 2872
- Docket No.
- 015780-043
- Confirmation No.
- 3817
Publication
- Pub. No.
- US20030227657A1
- Pub. Date
- 2003-12-11
Patent Term Adjustment
-77days
No related applications found.
CORRECTIVE ASSIGNMENT TO CORRECT SERIAL NUMBER 09632831, 09099389 AND 09956180 NUMBER SHOULD BE 09632631, 09627533 AND 09956160. PREVIOUSLY RECORDED ON REEL 014601 FRAME 0343.
Recorded 2004-07-12
NUNC PRO TUNC ASSIGNMENT
Recorded 2004-05-10
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2004-05-05
from
NAULLEAU, PATRICK P.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-06-05
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Quick Facts
- Patent No.
- US 6,768,567
- App. No.
- 10/163,479
- Filed
- 2002-06-05
- Granted
- 2004-07-27
- Pub. No.
- US20030227657A1
- Examiner
- BOUTSIKARIS, LEONIDAS
- Art Unit
- 2872
- PTA
- -77 days
External Links