Patent Assignment
Reel/Frame 011847/0316
Assignment of Assignor's Interest
Recorded: 2001-05-16
Received: 2001-06-04
Pages: 4
Assignor
LAURSEN, THOMAS
Executed: 2001-05-03
Assignee
SPEEDFAM-IPEC CORPORATION
305 NORTH 54TH STREET, CHANDLER, AZ, 85226, UNITED STATES
Covered Property
(1)
Multizone Slurry Delivery for Chemical Mechanical Polishing Tool
Application:
09/863,582 →