IP Library Granted Patent US 6,572,445
Granted Patent Utility
US 6,572,445 · Confirmation No. 1187

MULTIZONE SLURRY DELIVERY FOR CHEMICAL MECHANICAL POLISHING TOOL

Inventor: Thomas Laursen
⬇ PDF
Code Description Pages PDF
2001-05-16 TRNA Transmittal of New Application 5 View
2001-05-16 ADS Application Data Sheet 1 View
2001-05-16 SPEC Specification 11 View
2001-05-16 CLM Claims 3 View
2001-05-16 ABST Abstract 1 View
2001-05-16 DRW Drawings-only black and white line drawings 4 View
2001-05-16 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,572,445
App. No.
09/863,582
Filed
2001-05-16
Granted
2003-06-03
Pub. No.
US20020173232A1
Art Unit
3723
PTA
0 days