Granted Patent
Utility
US 6,572,445
· Confirmation No. 1187
MULTIZONE SLURRY DELIVERY FOR CHEMICAL MECHANICAL POLISHING TOOL
Inventor:
Thomas Laursen
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-05-16 | TRNA |
Transmittal of New Application | 5 | View | |
| 2001-05-16 | ADS |
Application Data Sheet | 1 | View | |
| 2001-05-16 | SPEC |
Specification | 11 | View | |
| 2001-05-16 | CLM |
Claims | 3 | View | |
| 2001-05-16 | ABST |
Abstract | 1 | View | |
| 2001-05-16 | DRW |
Drawings-only black and white line drawings | 4 | View | |
| 2001-05-16 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Thomas Laursen
Phoenix, AZ
Attorneys & Agents of Record
Classification
USPC
451/8
Prosecution
- Examiner
- MORGAN, EILEEN P
- Art Unit
- 3723
- Customer No.
- 29906
- Docket No.
- 004.0031 (SFI-894)
- Confirmation No.
- 1187
Publication
- Pub. No.
- US20020173232A1
- Pub. Date
- 2002-11-21
Patent Term Adjustment
0days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2007-09-28
from
LAURSEN, THOMAS
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-05-16
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Quick Facts
- Patent No.
- US 6,572,445
- App. No.
- 09/863,582
- Filed
- 2001-05-16
- Granted
- 2003-06-03
- Pub. No.
- US20020173232A1
- Examiner
- MORGAN, EILEEN P
- Art Unit
- 3723
- PTA
- 0 days
External Links