Patent Assignment
Reel/Frame 011851/0312
Assignment of Assignor's Interest
Recorded: 2001-05-23
Received: 2001-06-05
Pages: 4
Assignors
BEYER, KLAUS D.
Executed: 2001-05-18
JAMIN, FEN F.
Executed: 2001-05-21
VAREKAMP, PATRICK R.
Executed: 2001-05-23
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NY, 10504, UNITED STATES
Covered Property
(1)
Oxynitride Shallow Trench Isolation and Method of Formation
Application:
09/863,980 →