Granted Patent
Utility
US 6,498,383
· Confirmation No. 1418
OXYNITRIDE SHALLOW TRENCH ISOLATION AND METHOD OF FORMATION
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-05-23 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-05-23 | SPEC |
Specification | 18 | View | |
| 2001-05-23 | CLM |
Claims | 10 | View | |
| 2001-05-23 | ABST |
Abstract | 1 | View | |
| 2001-05-23 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2001-05-23 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Klaus D. Beyer
Poughkeepsie, NY
Fen F. Jamin
Wappingers Falls, NY
Patrick R. Varekamp
Croton-Hudson, NY
Classification
USPC
257/510
H10W10/014
H10W10/011
H10W10/17
H10W10/10
Prosecution
- Examiner
- MAI, ANH D
- Art Unit
- 2814
- Docket No.
- FIS920010039US1
- Confirmation No.
- 1418
Publication
- Pub. No.
- US20020177270A1
- Pub. Date
- 2002-11-28
Patent Term Adjustment
0days
Child
is a Division of
→
App. 10/246,252
· US 6,709,951
Filed 2002-09-18
· Patented Case
Child
PCT
is a Continuation of
→
PCT/US2002/016004
Filed 2002-05-17
· PCT - IPER (International Preliminary Examination Report) 409-416 Mailed
Child
is a Division of
→
App. 10/704,052
· US 6,764,922
Filed 2003-11-07
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
RELEASE OF SECURITY INTEREST
Recorded 2021-05-12
RELEASE OF SECURITY INTEREST
Recorded 2020-11-20
from
GLOBALFOUNDRIES INC.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2020-11-02
from
GLOBALFOUNDRIES INC.
SECURITY AGREEMENT
Recorded 2018-11-29
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-10-05
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-09-03
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-05-23
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Quick Facts
- Patent No.
- US 6,498,383
- App. No.
- 09/863,980
- Filed
- 2001-05-23
- Granted
- 2002-12-24
- Pub. No.
- US20020177270A1
- Examiner
- MAI, ANH D
- Art Unit
- 2814
- PTA
- 0 days
External Links