IP Library › Granted Patent US 6,709,951
Granted Patent Utility
US 6,709,951 · Confirmation No. 1904

OXYNITRIDE SHALLOW TRENCH ISOLATION AND METHOD OF FORMATION

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2004-01-15 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-10-24 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2003-10-24 NOA Notice of Allowance and Fees Due (PTOL-85) 1 View
2003-10-24 1449 List of References cited by applicant and considered by examiner 2 View
2003-10-24 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2003-10-24 CLM Claims 3 View
2003-10-24 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2003-10-08 WFEE Fee Worksheet (SB06) 1 View
2003-10-08 FWCLM Index of Claims 1 View
2003-10-06 SRNT Examiner's search strategy and results 1 View
2003-08-18 A.NE Response After Final Action 3 View
2003-08-18 CLM Claims 3 View
2003-08-18 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2003-08-18 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2003-07-10 CTFR Final Rejection 8 View
2003-07-10 892 List of references cited by examiner 1 View
2003-05-27 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2003-05-27 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2003-05-23 SRNT Examiner's search strategy and results 1 View
2003-05-16 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2003-05-16 CLM Claims 5 View
2003-05-16 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2003-03-13 CTNF Non-Final Rejection 6 View
2003-03-13 892 List of references cited by examiner 1 View
2003-03-13 1449 List of References cited by applicant and considered by examiner 2 View
2003-03-03 SRNT Examiner's search strategy and results 2 View
2003-03-03 SRNT Examiner's search strategy and results 2 View
2003-01-13 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2002-09-18 TRNA Transmittal of New Application 3 View
2002-09-18 A.PE Preliminary Amendment 4 View
2002-09-18 SPEC Specification 18 View
2002-09-18 CLM Claims 10 View
2002-09-18 ABST Abstract 1 View
2002-09-18 DRW Drawings-only black and white line drawings 3 View
2002-09-18 OATH Oath or Declaration filed 9 View
2002-09-18 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-09-18 WCLM Claims Worksheet (PTO-2022) 1 View
2002-09-18 A.PE Preliminary Amendment 1 View
2002-09-18 CLM Claims 1 View
2002-09-18 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2002-09-18 DRW Drawings-only black and white line drawings 3 View
2002-09-18 WFEE Fee Worksheet (SB06) 1 View
2002-09-18 TRNA Transmittal of New Application 3 View
2002-09-18 SPEC Specification 18 View
2002-09-18 CLM Claims 10 View
2002-09-18 ABST Abstract 1 View
2002-09-18 OATH Oath or Declaration filed 9 View
2002-09-18 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2002-09-18 SRFW Search information including classification, databases and other search related notes 1 View
2002-09-18 FWCLM Index of Claims 1 View
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Quick Facts
Patent No.
US 6,709,951
App. No.
10/246,252
Filed
2002-09-18
Granted
2004-03-23
Pub. No.
US20030015736A1
Art Unit
2814
PTA
-94 days