Assignment of Assignor's Interest

Recorded: 2001-05-30 Received: 2001-06-06 Pages: 2

Assignors

IKUNO, MASAO

Executed: 2001-05-29

KISHI, MASAHIKO

Executed: 2001-05-29

YOMO, MASAAKI

Executed: 2001-05-29

Assignee

NEC CORPORATION

MINATO-KU, 7-1, SHIBA 5-CHOME, TOKYO, JPX, JAPAN

Covered Property (1)

Method for Compensating Exposure Value for Exposure Process in Semiconductor Manufacturing System

Application: 09/866,617 →