Patent Application
Utility
App. No. 09/866,617
· Confirmation No. 5544
METHOD FOR COMPENSATING EXPOSURE VALUE FOR EXPOSURE PROCESS IN SEMICONDUCTOR MANUFACTURING SYSTEM
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-05-30 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-05-30 | ADS |
Application Data Sheet | 2 | View | |
| 2001-05-30 | SPEC |
Specification | 19 | View | |
| 2001-05-30 | CLM |
Claims | 13 | View | |
| 2001-05-30 | ABST |
Abstract | 1 | View | |
| 2001-05-30 | DRW |
Drawings-only black and white line drawings | 5 | View | |
| 2001-05-30 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
430/30
G03F7/70533
G03F7/70558
G03F7/70625
Prosecution
- Examiner
- YOUNG, CHRISTOPHER G
- Art Unit
- 1756
- Customer No.
- 466
- Docket No.
- PF-2803/NEC/US/MH
- Confirmation No.
- 5544
Foreign Priority
2000-159933
·
2000-05-30
·
JAPAN
Publication
- Pub. No.
- US20020009657A1
- Pub. Date
- 2002-01-24
Patent Term Adjustment
-142days
from
NEC CORPORATION
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-03-31
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-05-30
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Quick Facts
- App. No.
- 09/866,617
- Filed
- 2001-05-30
- Granted
- 2003-07-29
- Pub. No.
- US20020009657A1
- Examiner
- YOUNG, CHRISTOPHER G
- Art Unit
- 1756
- PTA
- -142 days
External Links