Patent Assignment
Reel/Frame 011893/0609
Assignment of Assignor's Interest
Recorded: 2001-06-07
Received: 2001-06-19
Pages: 3
Assignors
COOPER, ERIC
Executed: 2001-05-28
GRIZZARD, RICHARD
Executed: 2001-05-28
KNEER, EMIL
Executed: 2001-05-28
WALTERS, JOSEPH W.
Executed: 2001-05-28
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CA, 94538, UNITED STATES
Covered Property
(1)
Apparatus and Method for Conditioning Polishing Pad in a Chemical Mechanical Planarization Process
Application:
09/876,451 →