Patent Application
Utility
App. No. 09/876,451
· Confirmation No. 9187
APPARATUS AND METHOD FOR CONDITIONING POLISHING PAD IN A CHEMICAL MECHANICAL PLANARIZATION PROCESS
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2004-09-21 | LET. |
Miscellaneous Incoming Letter | 4 | View | |
| 2004-06-14 | IFEE |
Issue Fee Payment (PTO-85B) | 2 | View | |
| 2004-03-17 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-03-17 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-03-17 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-03-17 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-03-09 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2004-02-17 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 2 | View | |
| 2004-02-17 | CLM |
Claims | 5 | View | |
| 2004-02-17 | REM |
Applicant Arguments/Remarks Made in an Amendment | 5 | View | |
| 2003-11-13 | CTNF |
Non-Final Rejection | 7 | View | |
| 2003-11-13 | 892 |
List of references cited by examiner | 1 | View | |
| 2003-11-13 | 1449 |
List of References cited by applicant and considered by examiner | 2 | View | |
| 2001-10-12 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 5 | View | |
| 2001-10-12 | FOR |
Foreign Reference | 55 | View | |
| 2001-10-12 | FOR |
Foreign Reference | 81 | View | |
| 2001-06-07 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-06-07 | SPEC |
Specification | 17 | View | |
| 2001-06-07 | CLM |
Claims | 4 | View | |
| 2001-06-07 | ABST |
Abstract | 1 | View | |
| 2001-06-07 | DRW |
Drawings-only black and white line drawings | 8 | View | |
| 2001-06-07 | OATH |
Oath or Declaration filed | 4 | View | |
| 2001-06-07 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2001-06-07 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2001-06-07 | FWCLM |
Index of Claims | 1 | View | |
| 2001-06-07 | LET. |
Miscellaneous Incoming Letter | 2 | View | |
| 2001-06-07 | DRW |
Drawings-only black and white line drawings | 7 | View | |
| 2001-06-07 | SPEC |
Specification | 17 | View | |
| 2001-06-07 | CLM |
Claims | 4 | View | |
| 2001-06-07 | ABST |
Abstract | 1 | View | |
| 2001-06-07 | OATH |
Oath or Declaration filed | 4 | View | |
| 2001-06-07 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-06-07 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2001-06-07 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View |
Inventors
Joseph W. Walters
Orlando, FL
Emil Kneer
Orlando, FL
Eric Cooper
Orlando, FL
Richard Grizzard
Casselberry, FL
Attorneys & Agents of Record
Classification
USPC
156/345.12
B24B53/017
H10P52/402
Prosecution
- Examiner
- MACARTHUR, SYLVIA
- Art Unit
- 1763
- Docket No.
- 7103/238 (P0764)
- Confirmation No.
- 9187
Publication
- Pub. No.
- US20020185223A1
- Pub. Date
- 2002-12-12
Patent Term Adjustment
-4days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2008-05-18
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-06-07
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Quick Facts
- App. No.
- 09/876,451
- Filed
- 2001-06-07
- Granted
- 2004-07-27
- Pub. No.
- US20020185223A1
- Examiner
- MACARTHUR, SYLVIA
- Art Unit
- 1763
- PTA
- -4 days
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