Patent Assignment
Reel/Frame 011921/0256
Assignment of Assignor's Interest
Recorded: 2001-06-21
Pages: 2
Assignee
CANON KABUSHIKI KAISHA
3-30-2, SHIMOMARUKO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Supporting Structure of Optical Element, Exposure Apparatus Having the Same, and Manufacturing Method of Semiconductor Device