Assignment of Assignor's Interest

Recorded: 2001-06-18 Received: 2001-06-27 Pages: 2

Assignor

WACKERMAN, SCOTT C.

Executed: 2001-05-14

Assignee

SILICON VALLEY GROUP, INC.

101 METRO DRIVE, SAN JOSE, CA, 95110, UNITED STATES

Covered Property (1)

Environment Exchange Control for Material on a Wafer Surface

Application: 09/798,345 →