IP Library › Granted Patent US 6,780,461
Granted Patent Utility
US 6,780,461 · Confirmation No. 9462

ENVIRONMENT EXCHANGE CONTROL FOR MATERIAL ON A WAFER SURFACE

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2009-12-29 COCOUT Certificate of Correction - Post Issue Communication 7 View
2009-11-24 COCX Supervisory Patent Examiner Response - Return for Certificate of Correction 1 View
2009-01-30 IMIS Miscellaneous Internal Document 1 View
2009-01-07 COCIN Request for Certificate of Correction 11 View
2009-01-07 N417 Electronic Filing System Acknowledgment Receipt 2 View
2008-12-04 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2008-12-04 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2008-11-26 LET. Miscellaneous Incoming Letter 1 View
2008-11-26 PA.. Power of Attorney 1 View
2008-11-26 R3.73 Assignee showing of ownership per 37 CFR 3.73 4 View
2008-11-26 N417 Electronic Filing System Acknowledgment Receipt 2 View
2004-05-20 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-05-20 C.AD Change of Address 1 View
2004-05-18 PA.. Power of Attorney 2 View
2004-02-17 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-02-17 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-02-17 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-02-17 FWCLM Index of Claims 1 View
2004-02-17 SRFW Search information including classification, databases and other search related notes 1 View
2004-02-17 LET. Miscellaneous Incoming Letter 2 View
2004-02-17 DIST Terminal Disclaimer Filed 1 View
2004-02-06 DIST Terminal Disclaimer Filed 1 View
2004-01-26 A... Amendment/Request for Reconsideration-After Non-Final Rejection 4 View
2004-01-26 CLM Claims 3 View
2004-01-26 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2003-10-23 CTNF Non-Final Rejection 7 View
2003-10-23 FWCLM Index of Claims 1 View
2003-10-23 SRFW Search information including classification, databases and other search related notes 1 View
2003-10-16 DIST Terminal Disclaimer Filed 1 View
2003-10-16 TRNA Transmittal of New Application 2 View
2003-09-15 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2003-09-15 CLM Claims 4 View
2003-09-15 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2003-09-15 PA.. Power of Attorney 2 View
2003-09-15 RCEX Request for Continued Examination (RCE) 3 View
2003-03-12 CTFR Final Rejection 6 View
2003-03-12 892 List of references cited by examiner 1 View
2003-03-12 1449 List of References cited by applicant and considered by examiner 1 View
2003-01-10 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2003-01-10 FOR Foreign Reference 1 View
2003-01-02 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-01-02 SPEC Specification 1 View
2003-01-02 CLM Claims 1 View
2003-01-02 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2003-01-02 LET. Miscellaneous Incoming Letter 3 View
2003-01-02 DIST Terminal Disclaimer Filed 1 View
2002-07-02 CTNF Non-Final Rejection 7 View
2002-07-02 892 List of references cited by examiner 1 View
2002-07-02 1449 List of References cited by applicant and considered by examiner 1 View
2001-07-18 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2001-07-18 FOR Foreign Reference 17 View
2001-07-18 FOR Foreign Reference 26 View
2001-07-18 FOR Foreign Reference 10 View
2001-06-18 A.PE Preliminary Amendment 1 View
2001-06-18 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2001-06-18 OATH Oath or Declaration filed 8 View
2001-06-18 DRW Drawings-only black and white line drawings 5 View
2001-06-18 PEFR Applicant Response to Pre-Exam Formalities Notice 5 View
2001-06-18 A.PE Preliminary Amendment 2 View
2001-06-18 DRW Drawings-only black and white line drawings 5 View
2001-05-07 CFILE Request for Corrected Filing Receipt 2 View
2001-04-11 PEFN Pre-Exam Formalities Notice 2 View
2001-03-01 TRNA Transmittal of New Application 1 View
2001-03-01 SPEC Specification 16 View
2001-03-01 CLM Claims 2 View
2001-03-01 ABST Abstract 1 View
2001-03-01 DRW Drawings-only black and white line drawings 5 View
2001-03-01 WFEE Fee Worksheet (SB06) 1 View
2001-03-01 WCLM Claims Worksheet (PTO-2022) 1 View
2001-03-01 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-03-01 SRFW Search information including classification, databases and other search related notes 1 View
2001-03-01 FWCLM Index of Claims 1 View
2001-03-01 TRNA Transmittal of New Application 1 View
2001-03-01 SPEC Specification 16 View
2001-03-01 CLM Claims 2 View
2001-03-01 ABST Abstract 1 View
2001-03-01 DRW Drawings-only black and white line drawings 5 View
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Quick Facts
Patent No.
US 6,780,461
App. No.
09/798,345
Filed
2001-03-01
Granted
2004-08-24
Pub. No.
US20030190427A1
Art Unit
1762
PTA
-106 days