Patent Assignment
Reel/Frame 011921/0782
Assignment of Assignor's Interest
Recorded: 2001-06-18
Received: 2001-06-27
Pages: 2
Assignor
LEE, ED
Executed: 2001-05-14
Assignee
SILICON VALLEY GROUP, INC.
101 METRO DRIVE, SAN JOSE, CA, 95110, UNITED STATES
Covered Property
(1)
Environment Exchange Control for Material on a Wafer Surface
Application:
09/798,345 →