Patent Assignment
Reel/Frame 011931/0767
Assignment of Assignor's Interest
Recorded: 2001-06-25
Pages: 2
Assignor
MATSUI, SHIN
Executed: 2001-03-30
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Substrate Holding Device, Semiconductor Manufacturing Apparatus and Device Manufacturing Method