Patent Assignment
Reel/Frame 011945/0326
Assignment of Assignor's Interest
Recorded: 2001-07-02
Pages: 2
Assignee
TOKYO ELECTRON LIMITED
AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Method of Depositing Metal Film and Metal Deposition Cluster Tool Including Supercritical Drying/Cleaning Module