Patent Assignment
Reel/Frame 011946/0811
Assignment of Assignor's Interest
Recorded: 2001-06-29
Received: 2001-07-10
Pages: 3
Assignor
TOKITOH, SHUNICHI
Executed: 2001-06-14
Assignee
OKI ELECTRIC INDUSTRY CO., LTD.
MINATO-KU, 7-12, TORANOMON 1-CHOME, TOKYO, JPX, JAPAN
Covered Property
(1)
Method and Apparatus for Polishing Semiconductor Wafer
Application:
09/894,886 →