Patent Assignment
Reel/Frame 011951/0491
Assignment of Assignor's Interest
Recorded: 2001-07-05
Received: 2001-07-11
Pages: 3
Assignors
HADA, KEIKO
Executed: 2001-04-04
KATANO, TAKAYUKI
Executed: 2001-04-04
KITANO, JUNICHI
Executed: 2001-04-04
MATSUI, HIDEFUMI
Executed: 2001-04-04
ONO, YUKO
Executed: 2001-04-04
Assignee
TOKYO ELECTRON LIMITED
TBS BROADCAST CENTER 3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JPX, JAPAN
Covered Property
(1)
Evaluating Method of Hydrophobic Process, Forming Method of Resist Pattern, and Forming System of Resist Pattern
Application:
09/827,095 →