Patent Application
Utility
App. No. 09/827,095
· Confirmation No. 6403
EVALUATING METHOD OF HYDROPHOBIC PROCESS, FORMING METHOD OF RESIST PATTERN, AND FORMING SYSTEM OF RESIST PATTERN
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-07-02 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2001-04-06 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-04-06 | ADS |
Application Data Sheet | 3 | View | |
| 2001-04-06 | SPEC |
Specification | 34 | View | |
| 2001-04-06 | CLM |
Claims | 5 | View | |
| 2001-04-06 | ABST |
Abstract | 1 | View | |
| 2001-04-06 | DRW |
Drawings-only black and white line drawings | 13 | View |
Inventors
Junichi Kitano
Nirasaki-Shi, JAPAN
Keiko Hada
Nirasaki-Shi, JAPAN
Yuko Ono
Nirasaki-Shi, JAPAN
Takayuki Katano
Nirasaki-Shi, JAPAN
Hidefumi Matsui
Nirasaki-Shi, JAPAN
Attorneys & Agents of Record
Classification
USPC
430/313
H10P76/00
G03F7/16
Y10T428/2995
Prosecution
- Examiner
- SAGAR, KRIPA
- Art Unit
- 1756
- Customer No.
- 22850
- Docket No.
- 205528US0
- Confirmation No.
- 6403
Foreign Priority
2000-106515
·
2000-04-07
·
JAPAN
Publication
- Pub. No.
- US20020009592A1
- Pub. Date
- 2002-01-24
Patent Term Adjustment
-33days
No related applications found.
CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNEE'S ADDRESS PREVIOUSLY RECORDED ON REEL 011951 FRAME 0491.
Recorded 2001-10-12
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-07-05
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Quick Facts
- App. No.
- 09/827,095
- Filed
- 2001-04-06
- Granted
- 2003-09-09
- Pub. No.
- US20020009592A1
- Examiner
- SAGAR, KRIPA
- Art Unit
- 1756
- PTA
- -33 days
External Links