Patent Assignment
Reel/Frame 012244/0469
Corrective Assignment to Correct the Assignee's Address Previously Recorded on Reel 011951 Frame 0491.
Recorded: 2001-10-12
Pages: 4
Assignors
KITANO, JUNICHI
Executed: 2001-04-04
HADA, KEIKO
Executed: 2001-04-04
ONO, YUKO
Executed: 2001-04-04
KATANO, TAKAYUKI
Executed: 2001-04-04
MATSUI, HIDEFUMI
Executed: 2001-04-04
Assignee
TOKYO ELECTRON LIMITED
TBS BROADCAST CENTER, 3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO 107-8481, JAPAN
Covered Property
(1)
Evaluating Method of Hydrophobic Process, Forming Method of Resist Pattern, and Forming System of Resist Pattern