Patent Assignment
Reel/Frame 011952/0385
Assignment of Assignor's Interest
Recorded: 2001-07-05
Received: 2001-07-11
Pages: 4
Assignor
SHUMAN, RICHARD F.
Executed: 2001-06-21
Assignee
FEI COMPANY
7451 N.W. EVERGREEN PKWY, HILLSBORO, OR, 97124, UNITED STATES
Covered Property
(1)
Apparatus and Method for Reducing Differential Sputter Rates
Application:
09/818,988 →