Granted Patent
Utility
US 6,641,705
· Confirmation No. 9267
APPARATUS AND METHOD FOR REDUCING DIFFERENTIAL SPUTTER RATES
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2014-01-28 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2011-04-12 | COCOUT |
Certificate of Correction - Post Issue Communication | 2 | View | |
| 2011-03-03 | COCIN |
Request for Certificate of Correction | 5 | View | |
| 2011-03-03 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2011-03-03 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2003-09-03 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2003-09-03 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2001-03-27 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-03-27 | ADS |
Application Data Sheet | 2 | View | |
| 2001-03-27 | SPEC |
Specification | 33 | View | |
| 2001-03-27 | CLM |
Claims | 7 | View | |
| 2001-03-27 | ABST |
Abstract | 1 | View | |
| 2001-03-27 | DRW |
Drawings-only black and white line drawings | 19 | View | |
| 2001-03-27 | LET. |
Miscellaneous Incoming Letter | 1 | View |
Inventors
Michael Phaneuf
Ottawa, CANADA
Jian Li
Ottawa, CANADA
Richard F. Shuman
Concord, MA
Kathryn Noll
Tewksbury, MA
J. David Casey JR.
Peabody, MA
Attorneys & Agents of Record
Classification
USPC
204/192.34
Prosecution
- Examiner
- MCDONALD, RODNEY GLENN
- Art Unit
- 1753
- Customer No.
- 121028
- Docket No.
- PHUS007005US
- Confirmation No.
- 9267
Publication
- Pub. No.
- US20010053605A1
- Pub. Date
- 2001-12-20
Patent Term Adjustment
0days
Parent
Claims priority from a provisional application
→
App. 60/247,591
Filed 2000-11-09
· Provisional Application Expired
Parent
Claims priority from a provisional application
→
App. 60/192,488
Filed 2000-03-27
· Provisional Application Expired
Parent
is a Continuation in-part of
→
App. 09/522,561
· US 6,322,672
Filed 2000-03-10
· Patented Case
RELEASE OF SECURITY INTEREST
Recorded 2016-04-01
JP MORGAN CHASE BANK, N.A. (AS ADMINISTRATIVE AGENT),
J.P. MORGAN EUROPE LIMITED, AS ALTERNATIVE CURRENCY AGENT
from
FEI COMPANY
SECURITY AGREEMENT
Recorded 2008-06-09
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Quick Facts
- Patent No.
- US 6,641,705
- App. No.
- 09/818,988
- Filed
- 2001-03-27
- Granted
- 2003-11-04
- Pub. No.
- US20010053605A1
- Examiner
- MCDONALD, RODNEY GLENN
- Art Unit
- 1753
- PTA
- 0 days
External Links