Patent Assignment
Reel/Frame 038328/0787
Release of Security Interest
Recorded: 2016-04-01
Pages: 12
Assignors
JPMORGAN CHASE BANK, N.A.
Executed: 2016-03-24
J.P. MORGAN EUROPE LIMITED
Executed: 2016-03-24
Assignee
FEI COMPANY
5350 NE DAWSON CREEK BLVD., HILLSBORO, OREGON, 97124
Covered Properties
(142)
Localized Vacuum Apparatus and Method
Patent:
5,103,102 →
Application:
07/315,732 →
Particle Beam Shielding
Patent:
4,976,843 →
Application:
07/474,348 →
Linear and Rotary Positioning Device
Patent:
5,105,932 →
Application:
07/491,113 →
Correction System for a Charged-Particle Beam Apparatus
Patent:
5,084,622 →
Application:
07/564,221 →
High Speed Wafer Handler
Patent:
5,098,245 →
Application:
07/611,389 →
Ion Source Method and Apparatus
Patent:
5,034,612 →
Application:
07/622,178 →
Method of Semiconductor Device Manufacture
Patent:
5,188,705 →
Application:
07/685,844 →
Ion Beam Blanking Apparatus and Method
Patent:
5,155,368 →
Application:
07/686,043 →
Method of Directly Deriving Amplitude and Phase Information of an Object from Images Produced by a High-Resolution Electron Microscope
Patent:
5,134,288 →
Application:
07/731,676 →
Monopole Magnetic Lens Field
Patent:
5,268,579 →
Application:
07/741,026 →
Energy Filter for Charged Particle Beam Apparatus
Patent:
5,126,565 →
Application:
07/741,030 →
Charged Particle Beam Device
Patent:
5,235,188 →
Application:
07/741,282 →
High Speed Wafer Handling Method
Patent:
5,176,493 →
Application:
07/805,232 →
Charged Particle Beam Device
Patent:
5,221,844 →
Application:
07/837,517 →
Electron Beam Apparatus
Patent:
5,336,885 →
Application:
07/963,647 →
Precision Electrostatic Lens System and Method of Manufacture
Patent:
5,241,182 →
Application:
07/982,242 →
Method of Selecting a Spatial Energy Spread Within an Electron Beam, and an Electron Beam Apparatus Suitable for Carrying Out Such a Method
Patent:
5,300,775 →
Application:
08/015,694 →
Secondary Ion Mass Spectrometry System
Patent:
5,376,791 →
Application:
08/021,481 →
Environmental Scanning Electron Microscope
Patent:
5,362,964 →
Application:
08/100,545 →
Gas Injection System
Patent:
5,435,850 →
Application:
08/123,292 →
Method for Image Reconstruction in a High-Resolution Electron Microscope, and Electron Microscope Suitable for Use of Such a Method
Patent:
5,432,347 →
Application:
08/148,082 →
Energy Filter with Correction of a Second-Order Chromatic Aberration
Patent:
5,448,063 →
Application:
08/246,534 →
Environmental Scanning Electron Microscope
Patent:
5,412,211 →
Application:
08/253,548 →
Dual Electron Analyzer
Patent:
5,466,933 →
Application:
08/287,103 →
Additive Composition of Defocusing Images in an Electron Microscope
Patent:
5,466,937 →
Application:
08/301,444 →
Method of Making Specimens for an Electron Microscope
Patent:
5,563,412 →
Application:
08/328,228 →
Image-Based Three-Axis Positioner for Laser Direct Write Microchemical Reaction
Patent:
6,033,721 →
Application:
08/329,192 →
Particle-Optical Instrument Comprising a Deflection Unit for Secondary Electrons
Patent:
5,510,617 →
Application:
08/404,706 →
Particle-Optical Apparatus Comprising a Detector for Secondary Electrons
Patent:
5,578,822 →
Application:
08/419,493 →
Image-To-Image Registration Focused Ion Beam System
Patent:
5,541,411 →
Application:
08/498,740 →
Particle-Optical Apparatus Comprising an Electron Source with a Needle and a Membrane-Like Extraction Electrode
Patent:
5,587,586 →
Application:
08/538,512 →
Method for Particle Wave Reconstruction in a Particle-Optical Apparatus
Patent:
5,654,547 →
Application:
08/617,655 →
Thin Film Magnetic Recording Heads and Systems and Methods for Manufacturing the Same
Patent:
5,916,424 →
Application:
08/635,063 →
Gas Delivery Systems for Particle Beam Processing
Patent:
5,851,413 →
Application:
08/667,966 →
Laser-Induced Etching of Multilayer
Patent:
5,874,011 →
Application:
08/691,147 →
Field Emission Environmental Scanning Electron Microscope
Patent:
5,828,064 →
Application:
08/693,616 →
High Temperature Specimen Stage and Detector for an Environmental Scanning Electron Microscope
Patent:
6,025,592 →
Application:
08/695,207 →
Method of Reconstructing an Image in a Particle-Optical Apparatus
Patent:
5,753,913 →
Application:
08/723,652 →
Thin-Film Magnetic Recording Head Manufacturing Method
Patent:
6,004,437 →
Application:
08/810,837 →
Pattern Film Repair Using a Focused Particle Beam System
Patent:
6,042,738 →
Application:
08/834,356 →
Particle-Optical Apparatus Comprising a Fixed Diaphragm for the Mono- Chromator Filter
Patent:
5,838,004 →
Application:
08/849,205 →
Charged Particle Deposition of Electrically Insulating Films
Patent:
5,827,786 →
Application:
08/853,229 →
Correction Device for the Correction of Lens Aberrations in Particle -Optical Apparatus
Patent:
5,838,011 →
Application:
08/861,345 →
Correction Device for Correcting Chromatic Aberration in Particle-Optical Apparatus
Patent:
5,986,269 →
Application:
08/932,981 →
Method of Operating a Patricle-Optical Apparatus
Patent:
5,965,894 →
Application:
08/982,880 →
Particle-Optical Apparatus Including a Low-Temperature Specimen Holder
Patent:
5,986,270 →
Application:
08/990,870 →
Gaseous Backscattered Electron Detector for an Environmental Scanning Electron Microscope
Patent:
5,945,672 →
Application:
09/015,362 →
Focused Particle Beam Systems and Methods Using a Tilt Column
Patent:
6,039,000 →
Application:
09/022,065 →
Thin-Film Magnetic Recording Head Manufacture Using Selective Imaging
Patent:
6,332,962 →
Application:
09/070,559 →
Workpiece Vibration Damper
Patent:
6,113,056 →
Application:
09/129,451 →
Method and Apparatus for Selective in-Situ Etching of Inter Dielectric Layers
Patent:
6,268,608 →
Application:
09/169,566 →
Electrostatic Device for Correcting Chromatic Aberration in a Particle-Optical Apparatus
Patent:
6,184,975 →
Application:
09/195,887 →
Environmental Sem with a Multiple Fields for Improved Secondary Electron Detection
Patent:
6,184,525 →
Application:
09/205,441 →
Environmental Sem with a Magnetic Field for Improved Secondary Electron Direction
Patent:
6,365,896 →
Application:
09/205,526 →
Correction Device for Correcting the Spherical Aberration in Particle-Optical Apparatus
Patent:
6,191,423 →
Application:
09/209,969 →
Sem Provided with an Electrostatic Objective and an Electrical Scanning Device
Patent:
6,218,664 →
Application:
09/216,256 →
Correction Device for Correcting Chromatic Aberration in Particle-Optical Apparatus
Patent:
6,246,058 →
Application:
09/217,220 →
Method for Device Editing
Patent:
6,211,527 →
Application:
09/248,650 →
Measurement of Film Thickness by Inelastic Electron Scattering
Patent:
6,399,944 →
Application:
09/350,701 →
Method and Apparatus for Enhancing Yield of Secondary Ions
Patent:
6,414,307 →
Application:
09/350,718 →
Focused Particle Beam Systems and Methods Using a Tilt Column
Patent:
6,497,194 →
Application:
09/359,534 →
Correction Device for Correcting the Lens Defects in Particle-Optical Apparatus
Patent:
6,329,659 →
Application:
09/367,176 →
Focused Ion Beam Apparatus for Forming Thin-Film Magnetic Recording Heads
Patent:
6,354,438 →
Application:
09/370,753 →
Method and Apparatus for a Coaxial Optical Microscope with Focused Ion Beam
Patent:
6,373,070 →
Application:
09/415,644 →
Particle-Optical Apparatus Involving Detection of Auger Electrons.
Patent:
6,455,848 →
Application:
09/464,008 →
Interpolated Height Determination in an Atomic Force Microscope
Patent:
6,244,103 →
Application:
09/465,494 →
Sem for Transmission Operation with a Location-Senstive Detector
Patent:
6,376,839 →
Application:
09/473,537 →
System for Imaging a Cross-Section of a Substrate
Patent:
6,727,500 →
Application:
09/513,826 →
Method and apparatus for milling copper interconnects in a charged particle beam system
Patent:
6,322,672 →
Application:
09/522,561 →
Corrugated Style Anode Element for Ion Pumps
Patent:
6,388,385 →
Application:
09/528,093 →
Particle-Optical Apparatus Including a Particle Source That Can Be Switched Between High Brightness and Large Beam Current
Patent:
6,693,282 →
Application:
09/596,217 →
Schottky Emitter Having Extended Life
Patent:
6,680,562 →
Application:
09/639,451 →
Carbon Nanotube Probe Tip Grown on a Small Probe
Patent:
6,457,350 →
Application:
09/657,428 →
Wear Coating Applied to an Atomic Force Probe Tip
Patent:
6,504,151 →
Application:
09/660,654 →
Electron Analyzer Having an Integrated Low Pass Filter
Patent:
6,501,076 →
Application:
09/687,261 →
Particle Optical Apparatus
Patent:
6,462,332 →
Application:
09/689,059 →
Multi-Beam Lithography Apparatus with Mutually Different Beam Limiting Apertures
Shaped and Low Density Focused Ion Beams
Object Carrier for a Particle-Optical Apparatus
Multi-Column Fib for Nanofabrication Applications
Step Function Determination of Auger Peak Intensity
Method and Apparatus for Repairing Lithography Masks Using a Charged Particle Beam System
Apparatus and Method for Reducing Differential Sputter Rates
Collection of Secondary Electrons Through the Objective Lens of a Scanning Electron Microscope
Through-The-Lens Neutralization for Charged Particle Beam System
Real Time Monitoring for Simultaneous Imaging and Exposure in Charged Particle Beam Systems
Low Power Schottky Emitter
Focused Ion Beam System
Thin-Film Magnetic Recording Head Manufacture Using Selective Imaging
Particle-Optical Inspection Device Especially for Semiconductor Wafers
Sem Provided with a Secondary Electron Detector Having a Central Electrode
Fabrication of High Resistivity Structures Using Focused Ion Beams
Electron Beam System Using Multiple Electron Beams
Thin-Film Magnetic Recording Head Manufacture
Method of X-Ray Analysis in a Particle-Optical Apparatus
Focused Particle Beam Systems and Methods Using a Tilt Column
High Angular Intensity Schottky Electron Point Source
Apparatus for Tilting a Beam System
Method and Apparatus for Scanned Instrument Calibration
Electron Beam Processing
Graphical Automated Machine Control and Metrology
Electrostatic Manipulating Apparatus
Fabrication of Three Dimensional Structures
Integrated Measuring Instrument
Dummy Copper Deprocessing
Thin-Film Magnetic Recording Head Manufacture
Particle Detector Suitable for Detecting Ions and Electrons
Proximity Deposition
Magnetic Lens
Focused Ion Beam System with Coaxial Scanning Electron Microscope
Method of Obtaining a Particle-Optical Image of a Sample in a Particle-Optical Device
Particle-Optical Device and Detection Means
Shaped Sputter Shields for Improved Ion Column Operation
Ion Beam for Target Recovery
System for Imaging a Cross-Section of a Substrate
Angular Aperture Shaped Beam System and Method
Defect Analyzer
Method for the Manufacture and Transmissive Irradiation of a Sample, and Particle-Optical System
Directed Growth of Nanotubes on a Catalyst
Particle-Optical Device for Irradiating an Object
Charged Particle Beam System
Particle-Optical Apparatus with a Permanent-Magnetic Lens and an Electrostatic Lens
Method and Apparatus for Manipulating a Microscopic Sample
Sample Carrier for Carrying a Sample to Be Irradiated with an Electron Beam
Dual Beam System
Low Power Schottky Emitter
Method for Performing Focusing in a Particle-Optical Device with the Aid of Astigmatism in the Particle Beam
Magnetically Enhanced, Inductively Coupled Plasma Source for a Focused Ion Beam System
Cold Cathode Ion Gauge
Thin-Film Magnetic Recording Head Manufacture Using Selective Imaging
Particle Source with Selectable Beam Current and Energy Spread
Stylus System for Modifying Small Structures
Apparatus with Permanent Magnetic Lenses
Graphical Automated Machine Control and Metrology
Electron Source, and Charged-Particle Apparatus Comprising Such an Electron Source
Cluster Tool for Microscopic Processing of Samples
Method of Measuring Three-Dimensional Surface Roughness of a Structure
Method of Localizing Fluorescent Markers
Directed Growth of Nanotubes on a Catalyst
Patent:
7,258,901 →
Application:
11/387,561 →
Particle-Optical Appliance Provided with Aberration-Correcting Means
Apparatus with Permanent Magnetic Lenses
Method of Adjusting the Operating Region of a Tool Component to a Pre-Determined Element