IP Library Granted Patent US 7,034,316
Granted Patent B2
US 7,034,316 · App. 10/870,617 · Granted Apr 25, 2006

Sample carrier for carrying a sample to be irradiated with an electron beam

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Quick Facts
Patent No.
US 7,034,316
App. No.
10/870,617
Granted
Apr 25, 2006
Kind
B2
Abstract

Sample carriers for use in Transmission Electron Microscopes (TEMs) and freely commercially available have the form of a gauze with a strengthening edge. The thickness of these known sample carriers is of the order of magnitude of 20 μm, and is uniform across the entire sample holder. The tiny thickness of these fragile sample carriers makes manipulation difficult. There is a desire to realize automatic introduction and removal of sample carriers in a TEM, seeing as this would make it possible to use the TEM continuously, without human intervention. The invention describes a robust sample carrier whereby—both in the case of manual and automatic manipulation—deformation of and/or damage to the sample carrier is avoided. This is achieved by employing a strengthening edge portion 2 with a thickness 6 larger than the thickness 5 of the middle portion 1 of the sample carrier. The ability to use the sample carrier in analyses in which tilting is important is hereby not impeded.

Claims (22)

1. A sample carrier for carrying a sample to be irradiated with an electron beam, which sample carrier comprises a middle portion that is at least partially transparent to electrons, and an edge portion, located at the periphery of the middle portion, with a strengthening effect,

characterized in that, throughout at least a portion of the periphery of the middle portion, the edge portion has a thickness that is greater than the thickness of the middle portion.

2. A sample carrier according to claim 1 , whereby, throughout at least half of the periphery of the middle portion, the edge portion has a thickness that is greater than the thickness of the middle portion.

3. A sample carrier according to claim 2 , whereby the edge portion has a thickness that is at least twice as large as the thickness of the middle portion.

4. A sample carrier according to claim 2 , whereby the edge portion has a thickness that is at least ten times as large as the thickness of the middle portion.

5. A sample carrier according to claim 2 , whereby the edge portion is formed in such a manner that an electron beam passing through the central portion, with an angle of incidence of the electron beam of ±70 degrees with respect to the normal to the middle portion, will not be hindered by the edge portion.

6. A sample carrier according to claim 5 , whereby the edge portion has a thickness that is at least twice as large as the thickness of the middle portion.

7. A sample carrier according to claim 5 , whereby the edge portion has a thickness that is at least ten times as large as the thickness of the middle portion.

8. A sample carrier according to claim 1 , whereby, throughout the entire periphery of the middle portion, the edge portion has a thickness that is greater than the thickness of the middle portion.

9. A sample carrier according to claim 8 , whereby the edge portion has a thickness that is at least ten times as large as the thickness of the middle portion.

10. A sample carrier according to claim 8 , whereby the edge portion has a thickness that is at least twice as large as the thickness of the middle portion.

11. A sample carrier according to claim 8 , whereby the edge portion is formed in such a manner that an electron beam passing through the central portion, with an angle of incidence of the electron beam of ±70 degrees with respect to the normal to the middle portion, will not be hindered by the edge portion.

12. A sample carrier according to claim 11 , whereby the edge portion has a thickness that is at least twice as large as the thickness of the middle portion.

13. A sample carrier according to claim 11 , whereby the edge portion has a thickness that is at least ten times as large as the thickness of the middle portion.

14. A sample carrier according to claim 1 , whereby the edge portion is formed in such a manner that an electron beam passing through the central portion, with an angle of incidence of the electron beam of ±70 degrees with respect to the normal to the middle portion, will not be hindered by the edge portion.

15. A sample carrier according to claim 14 , whereby the edge portion has a thickness that is at least twice as large as the thickness of the middle portion.

16. A sample carrier according to claim 14 , whereby the edge portion has a thickness that is at least ten times as large as the thickness of the middle portion.

17. A sample carrier according to claim 1 , whereby the edge portion has a thickness that is at least twice as large as the thickness of the middle portion.

18. A sample carrier according to claim 1 , whereby the edge portion has a thickness that is at least ten times as large as the thickness of the middle portion.

19. A sample carrier for carrying a sample to be irradiated with an electron beam, which sample carrier comprises a middle portion that is at least partially transparent to electrons, and an edge portion, located at the periphry of the middle portion, with a strengthening effect, the sample carrier adapted for mounting into a sample holder of an electron microscope,

characterized in that, throughout at least a portion of the periphery of the middle portion, the edge portion has a thickness that is greater than the thickness of the middle portion.

20. A sample carrier according to claim 19 , in which the sample carrier is adapted to be mounted into a sample holder of a transmission electron microscope.

Assignments (3)
RELEASE OF SECURITY INTEREST Recorded Apr 1, 2016
From: JPMORGAN CHASE BANK, N.A.; J.P. MORGAN EUROPE LIMITED
To: FEI COMPANY
Reel/Frame 038328/0787 →
SECURITY AGREEMENT Recorded Jun 9, 2008
From: FEI COMPANY
To: JP MORGAN CHASE BANK, N.A. (AS ADMINISTRATIVE AGENT); J.P. MORGAN EUROPE LIMITED, AS ALTERNATIVE CURRENCY AGENT
Reel/Frame 021064/0319 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 17, 2004
From: WAGNER, RAYMOND; VAN DE WATER, GERBERT JEROEN
To: FEI COMPANY
Reel/Frame 015491/0896 →