Granted Patent
Utility
US 6,693,282 · App. 09/596,217
Particle-optical apparatus including a particle source that can be switched between high brightness and large beam current
Inventor:
Peter Christiaan Tiemeijer
Patented Case
View Patent ↗
Granted: Feb 17, 2004
Filed: Jun 19, 2000
Inventor
Peter Christiaan Tiemeijer
Assignee (at issue)
FEI Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.