IP Library › Granted Patent US 6,191,423
Granted Patent Utility
US 6,191,423 · App. 09/209,969

Correction device for correcting the spherical aberration in particle-optical apparatus

Inventors: Marcellinus Krijn, Karel Diederick Van Der Mast
Patented Case View Patent ↗
Granted: Feb 20, 2001 Filed: Dec 10, 1998
Inventors
Marcellinus Krijn
Karel Diederick Van Der Mast
Assignee (at issue)
Philips Electron Optics

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Quick Facts
Patent No.
US 6,191,423
App. No.
09/209,969
Filed
1998-12-10
Granted
2001-02-20
Kind
A