Granted Patent
Utility
US 6,753,538
· Confirmation No. 9807
ELECTRON BEAM PROCESSING
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2014-01-28 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2005-06-24 | COCOUT |
Certificate of Correction - Post Issue Communication | 1 | View | |
| 2005-05-19 | COCIN |
Request for Certificate of Correction | 3 | View | |
| 2004-05-10 | IFEE |
Issue Fee Payment (PTO-85B) | 2 | View | |
| 2004-02-12 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 6 | View | |
| 2004-02-12 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-02-12 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-02-12 | FWCLM |
Index of Claims | 1 | View | |
| 2004-01-02 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 3 | View | |
| 2003-10-01 | CTNF |
Non-Final Rejection | 6 | View | |
| 2003-10-01 | 892 |
List of references cited by examiner | 1 | View | |
| 2003-10-01 | 1449 |
List of References cited by applicant and considered by examiner | 2 | View | |
| 2003-10-01 | FWCLM |
Index of Claims | 1 | View | |
| 2003-10-01 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2003-09-05 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2003-01-30 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 4 | View | |
| 2002-11-13 | OATH |
Oath or Declaration filed | 6 | View | |
| 2002-11-13 | LET. |
Miscellaneous Incoming Letter | 4 | View | |
| 2002-09-04 | CTMS |
Miscellaneous Action with shortened statutory period (SSP) | 2 | View | |
| 2002-07-27 | TRNA |
Transmittal of New Application | 1 | View | |
| 2002-07-27 | ADS |
Application Data Sheet | 2 | View | |
| 2002-07-27 | SPEC |
Specification | 25 | View | |
| 2002-07-27 | CLM |
Claims | 7 | View | |
| 2002-07-27 | ABST |
Abstract | 1 | View | |
| 2002-07-27 | DRW |
Drawings-only black and white line drawings | 4 | View | |
| 2002-07-27 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-07-27 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View |
Inventors
Christian R. Musil
Cambridge, MA
J. David Casey JR.
West Roxbury, MA
Thomas J. Gannon
Ipswich, MA
Clive Chandler
Hillsboro, OR
Xiadong Da
Hillsboro, OR
Attorneys & Agents of Record
Classification
USPC
250/492.2
G03F1/74
H01J37/3053
H01J37/3056
H01J2237/31744
Prosecution
- Examiner
- HASHMI, ZIA R
- Art Unit
- 2881
- Customer No.
- 121028
- Docket No.
- F087
- Confirmation No.
- 9807
Publication
- Pub. No.
- US20030047691A1
- Pub. Date
- 2003-03-13
Patent Term Adjustment
-1days
RELEASE OF SECURITY INTEREST
Recorded 2016-04-01
JP MORGAN CHASE BANK, N.A. (AS ADMINISTRATIVE AGENT),
J.P. MORGAN EUROPE LIMITED, AS ALTERNATIVE CURRENCY AGENT
from
FEI COMPANY
SECURITY AGREEMENT
Recorded 2008-06-09
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-11-13
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Quick Facts
- Patent No.
- US 6,753,538
- App. No.
- 10/206,843
- Filed
- 2002-07-27
- Granted
- 2004-06-22
- Pub. No.
- US20030047691A1
- Examiner
- HASHMI, ZIA R
- Art Unit
- 2881
- PTA
- -1 days
External Links