IP Library › Patent Application 60308490
Patent Application Provisional
App. No. 60/308,490 · Confirmation No. 1312

Electron beam repair of photolithography masks

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2001-07-27 TRNA Transmittal of New Application 2 View
2001-07-27 ADS Application Data Sheet 1 View
2001-07-27 SPEC Specification 17 View
2001-07-27 CLM Claims 3 View
2001-07-27 ABST Abstract 1 View
2001-07-27 DRW Drawings-only black and white line drawings 3 View
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Quick Facts
App. No.
60/308,490
Filed
2001-07-27