IP Library › Granted Patent US 5,510,617
Granted Patent Utility
US 5,510,617 · App. 08/404,706

Particle-optical instrument comprising a deflection unit for secondary electrons

Inventors: Kars Z. Troost, Alexander Henstra
Patented Case View Patent ↗
Granted: Apr 23, 1996 Filed: Mar 15, 1995
Inventors
Kars Z. Troost
Alexander Henstra
Assignee (at issue)
U.S. Philips Corporation

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Quick Facts
Patent No.
US 5,510,617
App. No.
08/404,706
Filed
1995-03-15
Granted
1996-04-23
Kind
A