IP Library › Granted Patent US 6,709,554
Granted Patent Utility
US 6,709,554 · Confirmation No. 7432

METHOD AND APPARATUS FOR REPAIRING LITHOGRAPHY MASKS USING A CHARGED PARTICLE BEAM SYSTEM

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Quick Facts
Patent No.
US 6,709,554
App. No.
09/802,342
Filed
2001-03-09
Granted
2004-03-23
Pub. No.
US20010027917A1
Art Unit
1753
PTA
0 days