IP Library › Granted Patent US 5,838,011
Granted Patent Utility
US 5,838,011 · App. 08/861,345

Correction device for the correction of lens aberrations in particle-optical apparatus

Inventors: Marcellinus P. C. M. Krijn, Alexander Henstra, Karel D. Van Den Mast
Patented Case View Patent ↗
Granted: Nov 17, 1998 Filed: May 21, 1997
Inventors
Marcellinus P. C. M. Krijn
Alexander Henstra
Karel D. Van Den Mast
Assignee (at issue)
U.S. Philips Corporation

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Quick Facts
Patent No.
US 5,838,011
App. No.
08/861,345
Filed
1997-05-21
Granted
1998-11-17
Kind
A