IP Library › Granted Patent US 6,039,000
Granted Patent Utility
US 6,039,000 · App. 09/022,065

Focused particle beam systems and methods using a tilt column

Inventors: Charles J. Libby, Billy W. Ward
Patented Case View Patent ↗
Granted: Mar 21, 2000 Filed: Feb 11, 1998
Inventors
Charles J. Libby
Billy W. Ward
Assignee (at issue)
Micron Corporation

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Quick Facts
Patent No.
US 6,039,000
App. No.
09/022,065
Filed
1998-02-11
Granted
2000-03-21
Kind
A