Assignment of Assignor's Interest

Recorded: 2001-06-27 Received: 2001-07-12 Pages: 4

Assignor

EATON, ROBERT A.

Executed: 2001-06-26

Assignee

SPEEDFAM-IPEC CORPORATION

305 NORTH 54TH STREET, CHANDLER, AZ, 85226, UNITED STATES

Covered Property (1)

Method and Apparatus for Distributing Fluid to a Polishing Surface During Chemical Mechanical Polishing

Application: 09/893,131 →