IP Library Granted Patent US 6,641,462
Granted Patent Utility
US 6,641,462 · Confirmation No. 4045

METHOD AND APPARATUS FOR DISTRIBUTING FLUID TO A POLISHING SURFACE DURING CHEMICAL MECHANICAL POLISHING

Inventor: Robert A. Eaton
⬇ PDF
Code Description Pages PDF
2003-09-05 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-08-21 LET. Miscellaneous Incoming Letter 1 View
2003-08-21 DRW Drawings-only black and white line drawings 1 View
2001-06-27 TRNA Transmittal of New Application 5 View
2001-06-27 ADS Application Data Sheet 1 View
2001-06-27 SPEC Specification 15 View
2001-06-27 CLM Claims 5 View
2001-06-27 ABST Abstract 1 View
2001-06-27 DRW Drawings-only black and white line drawings 12 View
2001-06-27 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,641,462
App. No.
09/893,131
Filed
2001-06-27
Granted
2003-11-04
Pub. No.
US20030003850A1
Art Unit
3723
PTA
-3 days