Patent Assignment
Reel/Frame 012024/0955
Assignment of Assignor's Interest
Recorded: 2001-07-30
Pages: 3
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Electron Optical System, Charged-Particle Beam Exposure Apparatus Using the Same, and Device Manufacturing Method