Patent Assignment
Reel/Frame 012040/0226
Assignment of Assignor's Interest
Recorded: 2001-08-01
Pages: 3
Assignors
OGURE, NAOAKI
Executed: 2001-06-18
HORIE, KUNIAKI
Executed: 2001-06-18
ARAKI, YUJI
Executed: 2001-06-18
NAGASAKA, HIROSHI
Executed: 2001-06-18
KAKUTANI, MOMOKO
Executed: 2001-06-18
SATAKE, TOHRU
Executed: 2001-06-18
Assignee
EBARA CORPORATION
OHTA-KU, 11-1, HANEDA ASAHI-CHO, TOKYO, JAPAN
Covered Property
(1)
Coating, Modification and Etching of Substrate Surface with Particle Beam Irradiation of the Same